Loading and unloading station for semiconductor processing installations

ABSTRACT

In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation of application Ser. No. 10/012,142, filed Nov.13, 2001, now U.S. Pat. No. 6,609,876, which is a division ofapplication Ser. No. 09/497,057, filed Feb. 2, 2000, now U.S. Pat. No.6,375,403, which is a continuation of application Ser. No. 09/003,025filed Jan. 5, 1998, now U.S. Pat. No. 6,071,059, which is a continuationof application Ser. No. 08/615,386 filed Mar. 14, 1996, now U.S. Pat.No. 5,772,386.

BACKGROUND OF THE INVENTION

a) Field of the Invention

The invention is directed to a loading and unloading station forsemiconductor processing installations with at least one closeablecharging opening through which wafer-shaped or disk-shaped objects whichare accommodated in a transporting container can be loaded, unloaded andreloaded after removing a closure, wherein the transporting container isprovided with a container cover which extends substantially at rightangles to the loading plane.

b) Description of the Related Art

For the purpose of charging semiconductor processing installations, itis known to use so-called SMIF boxes as magazine containers with arelatively small enclosed volume in which wafer magazines can be storedand transported. The box can be placed on an opening mechanism in anenclosure or housing which encloses one or more work stations so as tokeep them free of dust. The box and opening mechanism have closingelements which are adapted to one another and which can be openedsimultaneously one above the other so that dust particles resting on theoutside of the closing elements can be enclosed therebetween when thewafer magazines are lowered into the housing together with the twoclosing elements. The box itself encloses the opening formed in thehousing.

A loading and unloading device according to the German Patent 43 26 309C1, for example, or a device having another operating sequence serves toremove the magazines from the transporting containers and place them inthe processing installation. After the semiconductor wafers areprocessed, the magazines are transported back in the transportingcontainers.

The technique of SMIF boxes is especially suited for semiconductorwafers with smaller diameters, as is conventional. In view of thematerial characteristics of the semiconductor wafers, these SMIF boxesand the wafer magazines used with them are becoming increasinglyunsuitable as transporting containers as the diameter of semiconductorwafers increases. Transporting containers which take over the functionof magazines at the same time are already known for semiconductor wafersof this type. Loading, unloading and reloading of the semiconductorwafers is effected individually in a plane parallel to the surface ofthe semiconductor wafers, wherein the transporting container can beclosed by a container cover extending substantially at right angles tothe loading and unloading plane. Accordingly, in contrast to the SMIFbox, the container cover is removed and inserted laterally rather thanin a downward direction.

Since the transporting containers are enclosed by a space with lowrequirements as regards cleanness and since there are no magazines whichcan be loaded and unloaded such as those used in the SMIF technique, thecharging of semiconductor processing installations proceeding from thesetransporting containers and the transporting back from suchinstallations into the transporting containers presents problems.Moreover, the problem is exacerbated in that optional loading andunloading into and out of a greater number of transporting containersmust be ensured under certain circumstances and the containersthemselves must be supplied and removed by operating personnel underfavorably ergonomic conditions.

An arrangement for storing, transporting and inserting substrates isknown from EP 542 793 B 1. In this arrangement, a cassette with alateral closing cap is arranged opposite a loading slot. The cassettesare brought into the loading position one after the other by a liftingplate which can hold a packet of stacked cassettes. When this positionis reached, the closing cap is swiveled open at one edge and thesubstrate wafer is inserted into the clean room by a drawer which cantravel out of the cassette. An air flow exiting from the loading slotprevents particles from penetrating into the clean room in that itpasses through an open gap between a protruding seal and the cassette.

OBJECT AND SUMMARY OF THE INVENTION

The primary object of the present invention is to ensure a charging ofsemiconductor processing installations proceeding from transportingcontainers under clean room conditions, these transporting containersthemselves serving as magazines for disk-shaped objects and being openlaterally. It should also be possible, optionally, to load and unload agreater quantity of such transporting containers, wherein the exchangeof transporting containers must be effected under favorable ergonomicconditions.

In a loading and unloading station for semiconductor processinginstallations with a closable charging opening through which disk-shapedobjects, which are accommodated in a transporting container, can beloaded, unloaded and reloaded after removing a closure, wherein thetransporting container is provided with a container cover whichsubstantially extends so as to be directed vertically to the loading andunloading plane, the object according to the present invention is met inthat the transporting container for loading, unloading and reloading ofdisk-shaped objects is coupled in a stationary manner by the containercover with the closure by means of an adhering engagement and asimultaneous opening of the charging opening and transporting containeris effected in that the container cover and the closure are moved downjointly into the semiconductor processing installation. The loading andunloading is carried out in that a manipulating device which is arrangedin the semiconductor processing installation engages through thecharging opening into the transporting container.

For the purpose of coupling with the closure, the transporting containeris deposited on a horizontally adjustable first platform which isprovided with means for aligning and securing the transportingcontainer.

The platform is adjustable between at least two planes which are locatedone above the other, one of which planes serves for charging with atransporting container at an ergonomic height, while the other servesfor loading and unloading the semiconductor processing installation.

In an advantageous manner, a suitable number of additional, horizontallyadjustable platforms which are provided with means for aligning andsecuring the transporting container can be provided for holding at leastone additional transporting container. At least one of the platformsserves alternately to couple a transporting container with the closure,while the others remain free for the exchange of transportingcontainers.

A storage is also advantageously provided for the exchange oftransporting containers, in which storage a gripper has optional accessto storage compartments or shelves which are arranged one above theother and a loading opening with a transporting container holder isprovided for manual charging with transporting containers. A spacecorresponding to the dimensions of a transporting container is left openadjacent to the storage shelves for transferring the transportingcontainers between the transporting container holder, storage shelves,and the platform. The transporting container holder should be able totravel out through the loading opening for the purpose of charging.

Further, the closure advantageously has vacuum suction devices forproducing the adhering engagement with the container cover and isprovided with elements for aligning relative to the container coverwhich can take effect before the adhering engagement is produced.

In order to open the transporting container, keys for actuating thelocking elements in the container cover project out of the closure,matching keyholes for these keys being provided in the container cover,by which the closure and container cover are secured above and beyondthe adhering engagement. The aligning elements and the keys can be heldin a springing manner vertically to the loading and unloading plane inorder to compensate for differences between the approach of the closureand the container cover.

Also, the charging opening is advantageously worked into a plate orshield which is adjustable, relative to the manipulating device, jointlywith the coupled transporting container for loading and unloading thedisk-shaped objects in a direction vertical to the loading and unloadingplane depending on the indexed positions. Accordingly, it is possible tocarry out the movement between the different planes as well as theindexing movements by means of an individual elevator.

However, it is also possible to construct the manipulating device forloading and unloading the disk-shaped objects in a direction vertical tothe loading and unloading plane depending upon the indexed positions.

By means of the described solution according to the invention,transporting containers of the type described above can be used withoutnegatively affecting the clean room conditions within the semiconductorprocessing installation to be charged. Semiconductor wafers withdimensions of 300 mm can be manipulated easily. Dust particles locatedon the container cover during the coupling with the closure are reliablyenclosed between the surfaces which are connected in an adheringengagement.

The invention will be explained more fully in the following withreference to the schematic drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings:

FIG. 1 shows a basic side view of a loading and unloading station with adisplaceable shield;

FIG. 2 shows a top view of the loading and unloading station;

FIG. 3 shows a front view of the loading and unloading station;

FIG. 4 is a perspective view of a loading and unloading station with atransporting container in the coupled and opened state;

FIG. 5 is a view in partial section of a first device for opening andclosing a closure, shown in the closed state;

FIG. 6 shows a side view of the device according to FIG. 5 in the closedstate;

FIG. 7 shows a perspective view of a loading and unloading station withan additional platform and additional transporting container;

FIG. 8 shows a side view of the loading and unloading station accordingto FIG. 7;

FIG. 9 shows a side view of a storage for transporting containers;

FIG. 10 shows the storage in a perspective view and partially opened;

FIG. 11 shows a top view of an opened storage;

FIG. 12 shows a closure and a container cover;

FIG. 13 shows the preorientated coupling of the closure and thecontainer cover;

FIG. 14 shows a first variant of a clipped and partially cut-awaytransporting container;

FIG. 15 shows a section A—A through the transporting container accordingto FIG. 14;

FIG. 16 shows a second variant of a clipped and partially cut-awaytransporting container;

FIG. 17 shows a section B—B through the transporting container accordingto FIG. 16;

FIG. 18 shows a front view of a portion of a loading and unloadingstation with a second device for opening and closing a closure; and

FIG. 19 shows a top view of the device according to FIG. 18.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

In FIGS. 1 to 3, a frame 1 which is connected in a stationary mannerwith a wall element 2 by two angled frame elements 3, 4 carries anelevator 5.

Platforms 7 which are adjustable horizontally in the direction of thewall element 2 in a guide 8 which is secured at the elevator 5 serve asholding means for transporting containers 6 which can be shaped andoutfitted in different ways within certain limits. The platforms 7,whose quantity is not restricted to that shown herein, are movable bymeans of the elevator 5 between at least two planes 9 and 10 which aresituated one above the other. While plane 9 is situated at anergonomically favorable height for charging the platforms 7, thesemiconductor processing installation is loaded and unloaded in plane10. For this purpose, a charging opening 13 which can be closed by meansof a closure 12 is worked into a shield 11. The shield 11 is adjustablein a direction vertical to the plane 10 along the wall 2 so as to beguided by guide means 14 and performs a sealing function relative to theopening in the wall element 2. A transporting container 6 is coupled tothe closure 12 by its container cover 15 in an adhering engagement bymeans of the horizontal displacement of one of the platforms 7 in thedirection of the wall element 2. For this purpose, suction elements 16are incorporated in the closure 12, a hose connection, not shown,leading from the latter to a vacuum source.

The container cover 15 which is slid into and locked in the transportingcontainer 6 is surrounded by a seal 17 ensuring a seal relative to thesurrounding wall. Unlocking is effected after the adhering engagement isproduced, and the closure 12 can be moved down together with thecontainer cover 15 into the semiconductor processing installation in themanner indicated by an angled arrow.

Every transporting container 6 has shelves for receiving disk-shapedobjects 19, which shelves are situated one above the other and areformed by projections 18. In order to load and unload the latter throughthe charging opening 13 in plane 10, it is necessary in the constructionshown in FIG. 1 to adjust the vertical position of the transportingcontainer 6 in a suitable manner. For this purpose, the transportingcontainer 6 is additionally sealed externally relative to the shield 11by a seal 20, this shield 11 being carried along in turn by a verticalindexing movement which is likewise executed by means of the elevator 5.The clean room conditions within the semiconductor processinginstallation remain unimpaired as a result of the sealing function ofthe shield 11.

For the purpose of indexing, an index sensor 21 detects the projections18 and the disk-shaped objects 19 during the vertical adjustment of thetransporting container 6.

Loading and unloading is effected in plane 10 by means of a manipulatingdevice 22 arranged in the clean room region of the semiconductorprocessing installation by engaging through the charging opening 13.

In the loading and unloading station shown in FIG. 4, a device which isshown in more detail in FIG. 5 is used to open and close a closure 23. Atransporting container 24 which is already opened is deposited on aplatform 26 which is supported by a stationary plate 25 and isdisplaceable horizontally in the direction indicated by the arrow, thistransporting container 24 communicating with a charging opening 27 in awall element 28. The closure 23 is secured to an arm 29, which isadjustable vertically and relative to the wall element 28, and supportsa container cover 30 which is coupled by means of an adheringengagement. Driving and controlling elements for the loading andunloading station are accommodated in a housing 31.

According to FIG. 5, lifting cylinders 32 and 33 are provided forvertical adjustment and for adjusting the arm 29 relative to the wallelement 28, wherein the lifting cylinder 32 which is secured to asupport plate 34 is swivelable together with the support plate 34 aboutan axis X—X until reaching a stop 35 by means of the action of thelifting cylinder 33.

In FIG. 7, in contrast to the embodiment form according to FIG. 4 whichprovides for holding only one transporting container 24, supports 36which are secured to the plate 25 carry an additional stationary plate37 to which is fastened a second platform 38 which is displaceablehorizontally in the direction of the arrow. Another transportingcontainer which is closed by a transporting container cover 39 isdesignated by 40.

The two platforms 26, 37 are adjustable vertically via a supporting arm42 which is connected with the plate 25 and can be raised and lowered bya drive 41. While one of the platforms 26, 37 serves to couple atransporting container 24 or 38 to the closure 23, the other remainsavailable for the exchange of transporting containers.

Of course, the vertical adjustability shown in FIGS. 7 and 8 is alsoreadily applicable by a person skilled in the art to the constructionshown in FIG. 4 in that only one transporting container is adjustablebetween two planes. Similarly, the quantity of transporting containerswhich can be held can also be increased in accordance with therespective requirements.

A storage can be used for changing transporting containers in loadingand unloading devices according to FIGS. 4, 7 and 8 as is described morefully with reference to FIGS. 9 to 11.

The loading and unloading device is integrated in a wall 43 of a housing44 provided with storage shelves 45 which are arranged one above theother and serve to hold transporting containers 46. In the presentembodiment example, the storage is so constructed that the storageshelves 45 are arranged above the platforms of the loading and unloadingdevice regardless of the loading and unloading direction. For thepurpose of optional access to the transporting containers 46 in thestorage shelves 45, it is essential that a space 47 corresponding to thedimensions of the transporting containers 46 be left open between thestorage shelves 45 and a wall of the housing 44 other than wall 43. Thewall at which the space is left open is determined by the availablespace for storage.

In the present construction, the free space is located at a wall 48adjoining the wall 43 with the loading and unloading device so that astorage of small depth is formed. A lockable loading opening 50 which,in addition to a transporting container holder 52 which can be moved outon guides 51, serves for manually charging the storage with thetransporting containers 46 is worked into the wall 49 located oppositewall 43 at an ergonomic height.

According to FIG. 11, a gripper 53 which is movable vertically andhorizontally for transferring the transporting containers 46 is securedto a horizontal drive 55 by an extension arm 54. The horizontal drive 55is in turn connected with an elevator 56.

In the cover region, the transporting containers 46 have a handle 57 tobe grasped automatically by the gripper 53. Sufficient space is leftabove each transporting container 46 for the extension arm 54 to actwith the gripper 53 for transferring.

After a transporting container 46 is grasped, it is transportedhorizontally from the storage shelf 45 into the open space 47 and isthen transported vertically up to a plane which corresponds to theergonomic height for manually charging the storage or to a plane forcharging a platform of the loading and unloading device. When the planeis reached, the transporting container 46 is transferred to the platformor the transporting container holder 52 in the moved in position (FIG.11 shows the transporting container holder 52 in the moved outposition). Displacement in the opposite direction is effected in ananalogous manner.

According to FIGS. 12 and 13, the closure 23 has suction elements 59emerging from bore holes 58, aligning elements in the form of pins 60being arranged in the center thereof. Further, keys 61 with a double-bitfor actuating locking elements 62 in the container cover 30 are providedin the closure 23. An elongated hole 63 and a bore hole 64 which areadapted to the pins 60 are incorporated in the container cover 30, asare corresponding keyholes 65 for the keys 61. For the purpose of apreorientated alignment of the container cover 30 relative to theclosure 23 during the coupling process, the pins 60 project beyond thesuction elements 59 so that the latter first engage in the elongatedhole 63 or in the bore hole 64. Subsequently, the keys 61 penetrate intothe keyholes 65, the suction elements 59 resting on the surface of thecontainer cover 30 by their projecting lips 66. During the suctionprocess which now takes place, in which the lips 66 move back completelyinto the bore holes 58 which are constructed with a sufficiently largediameter, the surfaces of the closure 23 and container cover 30 areconnected with one another in an adhering engagement and encloseadhering particles therebetween. By rotating the keys 61, a driver 67provided in the interior of the container cover 30 is actuated and opensthe locking elements 62. The closure 23 can be moved down into thesemiconductor processing installation together with the container cover30 so as to form a lock or transfer channel.

Apart from their opening function, the keys 61 exercise anotheradvantageous effect. After the keys 61 which are inserted into thekeyholes 65 are turned, the container cover 30 is also held, in theevent of a failure of the vacuum in the suction elements, in that thedouble-bit engages behind the keyholes 65. The lips 66 of the suctionelements 59 which expand again remain in tight contact with the surfaceof the container cover 30 so that both surfaces can be securely pressedtogether again immediately when the vacuum is restored. In order toprevent tensions during coupling, the aligning elements and the keys 61are additionally held in a springing manner inside the closure 23 whichis hollow inside.

Further advantageous steps for the coupling of the transportingcontainer will be seen from FIGS. 14 to 17. On the one hand, thetransporting container is deposited on the platform so as to be aligned.On the other hand, forces act on the transporting container during theopening process, as was explained, e.g., in the description referring toFIGS. 12 and 13, which forces must be compensated for in order toprevent disruption of the loading and unloading process.

In FIGS. 14 and 15, a transporting container 68 is deposited on aplatform 69 which corresponds in terms of function to the platformsshown in the Figures which were already described. The transportingcontainer 68 has shelves 70 in its interior for holding disk-shapedobjects. As was already mentioned with respect to the transportingcontainer in FIG. 11, a handle, designated in this instance by 71, foran automatically operating gripper is arranged in the cover region.Aligning elements in the form of grooves 72 and engaging pins 73 whichare adapted to one another for the purpose of orientated placement areprovided in a three-point formation in the base of the transportingcontainer 68 and in the platform 69. During the horizontal couplingmovement of the transporting container 68, a springing roller 74 slidesat a contact pressure arm 75, which is stationary relative to theplatform 69, along a beveled crosspiece 76, which is secured at the baseat a distance therefrom, and fixes the transporting container 68. Visualorientation pegs 77 may be helpful if the transporting container 6 is tobe placed on the platform 69 manually.

Another way of securing a transporting container on the platform isprovided by a solution according to FIGS. 16 and 17. A key 79 which isguided through a bore hole 78 in the platform 69 penetrates through akeyhole 80 during the placement of the transporting container 68, thiskeyhole 80 being worked into a plate 81 which is fastened at the base ata distance therefrom, and engages behind the plate 81 after a closingmovement.

Another device for opening and closing a closure is described withreference to FIGS. 18 and 19, by means of which device the loading andunloading device can be decreased in depth. As in FIGS. 1 to 3, thisembodiment example employs a shield, the charging opening being workedinto this shield. However, it is also possible to use a stationarycharging opening in combination with this device. Although the chargingopening is open, a coupled transporting container deposited on aplatform is not shown for the sake of simplicity.

The shield with the charging opening, designated in this instance by 82and 83, is supported by a frame 84 via guides 85 and guide slides 86. Aclosure 87 for the charging opening 83 is fastened, via an arm 88, to arotor axle 89 which is driven by a rotary drive 90. The rotary drive 90is screwed to a holding plate 91 which is displaceable in the loadingand unloading direction by means of a horizontal guide 92 on a supportplate 93 which is connected with the frame 84 in a stationary manner.The displacement is effected by means of a suitable drive 94, e.g., apneumatic drive.

The shield 82 is advantageously designed so as to be reinforced in theregion of the charging opening 83 and covers an opening in a wall 95 towhich the frame 84 is fastened. The opening, which is not visible, isdimensioned vertically so as to allow a vertical adjustment of thecharging opening 83 along the entire opening height. Accordingly, amanipulating device which is arranged in a stationary manner can achieveaccess through the charging opening in different indexed planes of acoupled transporting container.

A labyrinth seal 96 performs a sealing function during the adjustment ofthe shield 82, one portion of the labyrinth seal 96 being secured so asto adjoin the opening in the will 95 while the other portion is securedat the adjustable shield 82.

A driver 98 for the platform, which driver 98 can be actuated by apneumatic cylinder 97, is fastened at the shield 82 for the purpose ofcoupling the transporting container. After the platform has been movedalong with the transporting container into the coupling region, it isgrasped by the driver 98. By means of the lift of the pneumatic cylinder97, the transporting container, which is fixed on the platform, ispressed, with its container cover, against the closure 87 which is stillin the closing state. The closure 87 and the container cover areconnected with one another in an adhering engagement, as has alreadybeen described, and the locking elements in the container cover areopened.

When actuated by the drive 94, the support plate 93 is displacedtogether with the elements fastened thereto so that the closure 87,together with the container cover, is removed from the charging opening83. The closure 83 is driven by the motor 90 so as to rotate into aposition in which the charging opening is free for loading and unloadingthe disk-shaped objects. This position corresponds to that shown in FIG.18.

While the foregoing description and drawings represent the preferredembodiments of the present invention, it will be obvious to thoseskilled in the art that various changes and modifications may be madetherein without departing from the true spirit and scope of the presentinvention.

1. A loading and unloading station for a semiconductor processinginstallation comprising: a frame having a charging opening therethroughand at least partially forming a storage area for storing a plurality ofsemiconductor transport containers; a movement apparatus for verticallyand horizontally moving the semiconductor transport containers betweenthe storage area and the charging opening, the movement apparatuscomprising a vertically movable support which simultaneously verticallymoves two of the transport containers respectively into and out ofregistry with the charging opening.
 2. A loading and unloading stationas in claim 1 wherein the movement apparatus further comprises a robotfor moving the transport containers between the storage area and thesupport.
 3. A loading and unloading station as in claim 1 furthercomprising a transport container holder movably connected to the framefor moving the transport containers through a loading opening throughthe frame.
 4. A loading and unloading station as in claim 1 wherein thestorage area comprises multiple storage shelves spaced from the support.5. A loading and unloading station as in claim 1 further comprising asubstrate manipulating device for moving substrates through the chargingopening into and out of one of the transport containers.
 6. A loadingand unloading station for a semiconductor processing installationcomprising: a frame having a charging opening therethrough and at leastpartially forming a storage area for storing a plurality ofsemiconductor transport containers; a movement apparatus for verticallyand horizontally moving the semiconductor transport containers betweenthe storage area and the charging opening, the movement apparatuscomprising a vertically movable support which simultaneously verticallymoves two of the transport containers respectively into and out ofregistry with the charging opening; wherein the support comprises atleast two horizontally movable platforms.
 7. A loading and unloadingstation for a semiconductor processing installation comprising: a framehaving a charging opening therethrough and at least partially forming astorage area for storing a plurality of semiconductor transportcontainers; a movement apparatus for vertically and horizontally movingthe semiconductor transport containers between the storage area and thecharging opening, the movement apparatus comprising a vertically movablesupport which simultaneously vertically moves two of the transportcontainers respectively into and out of registry with the chargingopening; further comprising a movable closure located at a rear of thecharging opening, the closure being movable into and out of a horizontalsubstrate movement path through the charging opening.
 8. A loading andunloading station as in claim 7 wherein the closure comprises a memberfor connecting directly to a front cover of one of the transportcontainers located at the charging opening.
 9. A loading and unloadingstation for a semiconductor processing installation comprising: a framehaving a charging opening therethrough and at least partially forming astorage area for storing a plurality of semiconductor transportcontainers; a movement apparatus for vertically and horizontally movingthe semiconductor transport containers between the storage area and thecharging opening, the movement apparatus comprising a vertically movablesupport which simultaneously vertically moves two of the transportcontainers respectively into and out of registry with the chargingopening; wherein the support comprises platforms which each comprise aformation of at least three alignment members for alignment mounting thetransport containers on the platforms.
 10. A loading and unloadingstation as in claim 9 wherein the platforms each comprise at least onefixation device.
 11. A loading and unloading station as in claim 10wherein the alignment members comprise pins extending upward from topsurfaces of the platforms.
 12. A loading and unloading station for asemiconductor processing installation comprising: a frame having acharging opening therethrough and at least partially forming a storagearea for storing a plurality of semiconductor transport containers; amovement apparatus for vertically and horizontally moving thesemiconductor transport containers between the storage area and thecharging opening, the movement apparatus comprising a vertically movablesupport which simultaneously vertically moves two of the transportcontainers respectively into and out of registry with the chargingopening; further comprising a sensor located for detecting items in aninterior area of the transport containers.
 13. A loading and unloadingstation as in claim 12 wherein the sensor comprises an indexing sensorwhich is adapted to detect the items in the interior area of thetransport containers based upon relative vertical movement of the itemsrelative to the indexing sensor.
 14. A loading and unloading station fora semiconductor processing installation comprising: a frame having atleast two spaced openings therethrough and a storage area locatedbetween the openings for storing a plurality of semiconductor transportcontainers; a robot connected to the frame for moving the transportcontainers to or from the storage area; and a movable closure at asecond one of the openings, wherein the robot is adapted to at leastpartially move the transport containers to the second opening, andwherein the closure is adapted to remove a front cover from thetransport containers at a second opening and move the front coverthrough and out of the second opening.
 15. A loading and unloadingstation for semiconductor substrates, the station comprising: a supportfor supporting a substrate transport container thereon; and a coverremover for removing a side cover from a side opening of the substratetransport container while the substrate transport container is connectedto the support, wherein the cover remover comprises at least one keyextending outward from a lateral side of the cover remover for generalhorizontal insertion into a keyhole in the side cover when there isrelative movement of the cover remover and the substrate transportcontainer towards each other, wherein the at least one key is adapted tocapture and hold the side cover on the cover remover when the at leastone key is inserted into the keyhole.
 16. A loading and unloadingstation as in claim 15 wherein the at least one key is movable.
 17. Aloading and unloading station as in claim 16 wherein the at least onekey is rotatable.
 18. A loading and unloading station as in claim 17wherein the at least one key comprises a portion which, when the key islocated in the keyhole and moved, locates the portion behind a portionof the cover behind the keyhole to retain the cover on the key.
 19. Aloading and unloading station as in claim 16 wherein the at least onekey comprises at least two keys spaced from each other.
 20. A loadingand unloading station as in claim 15 wherein the support comprises ahorizontally movable platform.
 21. A loading and unloading station as inclaim 15 wherein the support comprises multiple vertically movableplatforms, each platform being adapted to support a respective separatetransport container thereon.
 22. A loading and unloading station as inclaim 21 wherein at least one of the platforms is horizontally movable.23. A loading and unloading station as in claim 15 wherein the supportcomprises a top surface with a formation of alignment connectors forremovably connecting a bottom side of the transport container to theconnectors, wherein the formation comprises at least three of thealignment connectors in the formation.
 24. A loading and unloadingstation as in claim 23 wherein the connectors extend upward from the topsurface in a general cantilever fashion.
 25. A loading and unloadingstation as in claim 24 further comprising a fastener on the support forfastening the bottom side of the transport container to the support. 26.A loading and unloading station as in claim 15 wherein the cover removerfurther comprises an alignment member extending outward from the lateralside of the cover remover a longer distance than the at least one key.27. A loading and unloading station as in claim 15 wherein the coverremover further comprises a suction element at the lateral side of thecover remover.
 28. A loading and unloading station as in claim 27wherein the cover remover comprises a hole at the lateral side andwherein the suction element extends out of the hole.
 29. A loading andunloading station for semiconductor substrates, the station comprising:a support for supporting a substrate transport container thereon; and acover remover for removing a side cover from a side opening of thesubstrate transport container while the substrate transport container isconnected to the support, wherein the cover remover comprises at leastone key extending outward from a lateral side of the cover remover forgeneral horizontal insertion into a keyhole in the side cover when thereis relative movement of the cover remover and the substrate transportcontainer towards each other; wherein the at least one key is springheld inside the cover remover to prevent tensions during coupling of theclosure with the side cover.
 30. A combined aperture closure andsubstrate transport container side cover connector, the combined closureand connector comprising: a side surface; and at least two keysextending outward from the side surface, wherein the side surface issuitably sized and shaped to substantially block a charging opening in asubstrate loading and unloading station, and wherein the keys aresuitably sized and shaped to be inserted into keyholes in a side coverof a substrate transport container and wherein at least one of the twokeys is shaped to capture and hold the side cover on the closure.
 31. Acombined closure and connector as in claim 30 wherein at least one ofthe keys is movable.
 32. A combined closure and connector as in claim 31wherein the at least one key is rotatable.
 33. A combined closure andconnector as in claim 30 further comprises an alignment member extendingoutward from the side surface a longer distance than at least one of thekeys.
 34. A combined closure and connector as in claim 30 furthercomprising at least one suction element at the side surface.
 35. Acombined closure and connector as in claim 34 wherein the side surfacecomprises a hole and the suction element extends outward out of thehole.
 36. A combined closure and substrate transport container sidecover connector, the combined closure and connector comprising: a sidesurface; and at least two keys extending outward from the side surface,wherein the side surface is suitably sized and shaped to substantiallyblock a charging opening in a substrate loading and unloading station,and wherein the keys are suitably sized and shaped to be inserted intokeyholes in a side cover of a substrate transport container; wherein theat least two keys each comprise a portion which, when located in thekeyholes and moved, locate behind a section of the side cover behind thekeyholes to retain the side cover on the keys.
 37. A combined closureand substrate transport container side cover connector, the combinedclosure and connector comprising: a side surface; and at least two keysextending outward from the side surface, wherein the side surface issuitably sized and shaped to substantially block a charging opening in asubstrate loading and unloading station, and wherein the keys aresuitably sized and shaped to be inserted into keyholes in a side coverof a substrate transport container; wherein the at least two keys arespring held on the combined closure and connector to prevent tensionsduring coupling of the keys with the side cover.
 38. A loading andunloading station for semiconductor substrates, the station comprising:a frame having an opening therethrough; and a closure movable relativeto the frame between a first position wherein the opening issubstantially closed by the closure and a second position wherein theopening is not substantially closed by the closure, the closurecomprising an exterior side, at least one suction holding aperture atthe exterior side, and at least one rotatable key projecting outwardfrom the exterior side for engaging a transport carrier.
 39. A loadingand unloading station for semiconductor substrates, the stationcomprising: a frame having an opening therethrough; a closure movablerelative to the frame between a first position wherein the opening issubstantially closed by the closure and a second position wherein theopening is not substantially closed by the closure, the closurecomprising an exterior side positionable at the opening and at least onekey extending outward from the exterior side, the key being spring heldinside the closure to prevent tensions during coupling of the closurewith a substrate transport container.
 40. A loading and unloadingstation for a semiconductor processing installation, the stationcomprising: a frame having a charging opening; a support located at afirst side of the charging opening for supporting a semiconductorsubstrate transport container; a closure located at a second side of thecharging opening, the closure being movable to open and close ahorizontal path through the charging opening, the closure having a keywhich is insertable into a keyhole of a side cover of the transportcontainer for unlatching the side cover from the transport container;and a semiconductor substrate manipulator device for horizontally movingthe substrates through the charging opening into and out of thetransport container.